Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth

A. Videcoq; A. Pimpinelli; M. Vladimirova

doi:10.1016/S0169-4332(01)00214-8

Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth

A. Videcoq, A. Pimpinelli, M. Vladimirova

Houston Methodist

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We describe the kinetics of the step bunching instability of a miscut (vicinal) surface by studying the distribution of terrace widths as a function of deposition time. The results are compared with models previously developed for equilibrium situations. This analysis allows a quantitative description of the surface structure and of its appearance.

Original language	English (US)
Pages (from-to)	213-220
Number of pages	8
Journal	Applied Surface Science
Volume	177
Issue number	4
DOIs	https://doi.org/10.1016/S0169-4332(01)00214-8
State	Published - Jun 15 2001

Keywords

Homoepitaxial growth
Kinetic Monte Carlo simulations
Kinetic phenomena
Step bunching
Terrace width distribution
Vicinal single crystal surfaces

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth",

abstract = "We describe the kinetics of the step bunching instability of a miscut (vicinal) surface by studying the distribution of terrace widths as a function of deposition time. The results are compared with models previously developed for equilibrium situations. This analysis allows a quantitative description of the surface structure and of its appearance.",

keywords = "Homoepitaxial growth, Kinetic Monte Carlo simulations, Kinetic phenomena, Step bunching, Terrace width distribution, Vicinal single crystal surfaces",

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T1 - Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth

AU - Videcoq, A.

AU - Pimpinelli, A.

AU - Vladimirova, M.

PY - 2001/6/15

Y1 - 2001/6/15

N2 - We describe the kinetics of the step bunching instability of a miscut (vicinal) surface by studying the distribution of terrace widths as a function of deposition time. The results are compared with models previously developed for equilibrium situations. This analysis allows a quantitative description of the surface structure and of its appearance.

AB - We describe the kinetics of the step bunching instability of a miscut (vicinal) surface by studying the distribution of terrace widths as a function of deposition time. The results are compared with models previously developed for equilibrium situations. This analysis allows a quantitative description of the surface structure and of its appearance.

KW - Homoepitaxial growth

KW - Kinetic Monte Carlo simulations

KW - Kinetic phenomena

KW - Step bunching

KW - Terrace width distribution

KW - Vicinal single crystal surfaces

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U2 - 10.1016/S0169-4332(01)00214-8

DO - 10.1016/S0169-4332(01)00214-8

M3 - Article

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EP - 220

JO - Applied Surface Science

JF - Applied Surface Science

IS - 4

ER -

Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth

Abstract

Keywords

ASJC Scopus subject areas

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