Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth

A. Videcoq, A. Pimpinelli, M. Vladimirova

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

We describe the kinetics of the step bunching instability of a miscut (vicinal) surface by studying the distribution of terrace widths as a function of deposition time. The results are compared with models previously developed for equilibrium situations. This analysis allows a quantitative description of the surface structure and of its appearance.

Original languageEnglish (US)
Pages (from-to)213-220
Number of pages8
JournalApplied Surface Science
Volume177
Issue number4
DOIs
StatePublished - Jun 15 2001

Keywords

  • Homoepitaxial growth
  • Kinetic Monte Carlo simulations
  • Kinetic phenomena
  • Step bunching
  • Terrace width distribution
  • Vicinal single crystal surfaces

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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