Kinetic modelling of the selective epitaxy of GaAs on patterned substrates by HVPE. Application to the conformal growth of low defect density GaAs layers on silicon

E. Gil-Lafon, J. Napierala, D. Castelluci, Alberto Pimpinelli, B. Gérard, D. Pribat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

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