Kinetic modelling of the selective epitaxy of GaAs on patterned substrates by HVPE. Application to the conformal growth of low defect density GaAs layers on silicon

E. Gil-Lafon, J. Napierala, D. Castelluci, Alberto Pimpinelli, B. Gérard, D. Pribat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

The selective growth of GaAs by HVPE was studied on (001), (110), (111)Ga and (111)As GaAs patterned substrates by varying the III/V ratio. A kinetic modelling of the growth was developed, based upon the SEM observations of the growth morphologies as well as on experimental curve synthesis. The growth rate is written as a function of the diffusion fluxes of the adsorbed AsGa and AsGaCl molecules and takes into account the chlorine desorption by H2. 1.5 μm thick GaAs films were then fabricated on Si (001) by a confined epitaxial lateral overgrowth technique. These conformal films exhibit intense and uniform luminescence signals, showing that the dislocation densities of GaAs are lower than 105 cm-2 SEM analyses reveal that conformal growth fronts consist in (110) and (111)As planes under the III/V ratios (superior to 1) which were tested.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages33-38
Number of pages6
Volume535
ISBN (Print)1558994416, 9781558994416
StatePublished - Dec 1 1999
EventProceedings of the 1998 MRS Fall Meeting - Symposium D: 'Integration of Dissimilar Materials in Micro- and Optoelectronics - Symposium I: 'III-V and SiGe Group IV Device/IC Processing Challeneges for Commercial Applications' - Boston, MA, USA
Duration: Nov 30 1998Dec 3 1998

Other

OtherProceedings of the 1998 MRS Fall Meeting - Symposium D: 'Integration of Dissimilar Materials in Micro- and Optoelectronics - Symposium I: 'III-V and SiGe Group IV Device/IC Processing Challeneges for Commercial Applications'
CityBoston, MA, USA
Period11/30/9812/3/98

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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