Influence of ion assistance on the optical properties of MgF2

Philip J. Martin, Wayne G. Sainty, Roger P. Netterfield, David R. McKenzie, David J.H. Cockayne, Soey H. Sie, Obert R. Wood, Harold G. Craighead

Research output: Contribution to journalArticlepeer-review

46 Scopus citations


The optical properties of MgF2 films prepared by evaporation and ion-assisted deposition have been determined from transmittance and near-normal incidence reflectance measurements and also from electronenergy loss spectroscopy (EELS). The results show that oxygen-ion assistance leads to higher extinction coefficientsfor wavelengths <180 nm. Transmission electron microscopy studies show that the crystal grain size of MgF2 films is not strongly affected by oxygen or argon-ion bombardment. The presence of MgO in the films is inferred from RBS measurements and proposed to be the major factor influencing VUV losses. EELS is also demonstrated to be a valuable technique for determination of optical properties from the near-infrared to x-ray regions of the spectrum.

Original languageEnglish (US)
Pages (from-to)1235-1239
Number of pages5
JournalApplied Optics
Issue number7
StatePublished - Apr 1987

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering


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