Influence of ion assistance on the optical properties of MgF2

Philip J. Martin; Wayne G. Sainty; Roger P. Netterfield; David R. McKenzie; David J.H. Cockayne; Soey H. Sie; Obert R. Wood; Harold G. Craighead

doi:10.1364/AO.26.001235

Influence of ion assistance on the optical properties of MgF2

Philip J. Martin, Wayne G. Sainty, Roger P. Netterfield, David R. McKenzie, David J.H. Cockayne, Soey H. Sie, Obert R. Wood, Harold G. Craighead

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

The optical properties of MgF2 films prepared by evaporation and ion-assisted deposition have been determined from transmittance and near-normal incidence reflectance measurements and also from electronenergy loss spectroscopy (EELS). The results show that oxygen-ion assistance leads to higher extinction coefficientsfor wavelengths <180 nm. Transmission electron microscopy studies show that the crystal grain size of MgF2 films is not strongly affected by oxygen or argon-ion bombardment. The presence of MgO in the films is inferred from RBS measurements and proposed to be the major factor influencing VUV losses. EELS is also demonstrated to be a valuable technique for determination of optical properties from the near-infrared to x-ray regions of the spectrum.

Original language	English (US)
Pages (from-to)	1235-1239
Number of pages	5
Journal	Applied Optics
Volume	26
Issue number	7
DOIs	https://doi.org/10.1364/AO.26.001235
State	Published - Apr 1987

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

Access to Document

10.1364/AO.26.001235

Cite this

@article{ee4227f904b04010a4145b2f3e298530,

title = "Influence of ion assistance on the optical properties of MgF2",

abstract = "The optical properties of MgF2 films prepared by evaporation and ion-assisted deposition have been determined from transmittance and near-normal incidence reflectance measurements and also from electronenergy loss spectroscopy (EELS). The results show that oxygen-ion assistance leads to higher extinction coefficientsfor wavelengths <180 nm. Transmission electron microscopy studies show that the crystal grain size of MgF2 films is not strongly affected by oxygen or argon-ion bombardment. The presence of MgO in the films is inferred from RBS measurements and proposed to be the major factor influencing VUV losses. EELS is also demonstrated to be a valuable technique for determination of optical properties from the near-infrared to x-ray regions of the spectrum.",

author = "Martin, {Philip J.} and Sainty, {Wayne G.} and Netterfield, {Roger P.} and McKenzie, {David R.} and Cockayne, {David J.H.} and Sie, {Soey H.} and Wood, {Obert R.} and Craighead, {Harold G.}",

year = "1987",

month = apr,

doi = "10.1364/AO.26.001235",

language = "English (US)",

volume = "26",

pages = "1235--1239",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "7",

}

TY - JOUR

T1 - Influence of ion assistance on the optical properties of MgF2

AU - Martin, Philip J.

AU - Sainty, Wayne G.

AU - Netterfield, Roger P.

AU - McKenzie, David R.

AU - Cockayne, David J.H.

AU - Sie, Soey H.

AU - Wood, Obert R.

AU - Craighead, Harold G.

PY - 1987/4

Y1 - 1987/4

N2 - The optical properties of MgF2 films prepared by evaporation and ion-assisted deposition have been determined from transmittance and near-normal incidence reflectance measurements and also from electronenergy loss spectroscopy (EELS). The results show that oxygen-ion assistance leads to higher extinction coefficientsfor wavelengths <180 nm. Transmission electron microscopy studies show that the crystal grain size of MgF2 films is not strongly affected by oxygen or argon-ion bombardment. The presence of MgO in the films is inferred from RBS measurements and proposed to be the major factor influencing VUV losses. EELS is also demonstrated to be a valuable technique for determination of optical properties from the near-infrared to x-ray regions of the spectrum.

AB - The optical properties of MgF2 films prepared by evaporation and ion-assisted deposition have been determined from transmittance and near-normal incidence reflectance measurements and also from electronenergy loss spectroscopy (EELS). The results show that oxygen-ion assistance leads to higher extinction coefficientsfor wavelengths <180 nm. Transmission electron microscopy studies show that the crystal grain size of MgF2 films is not strongly affected by oxygen or argon-ion bombardment. The presence of MgO in the films is inferred from RBS measurements and proposed to be the major factor influencing VUV losses. EELS is also demonstrated to be a valuable technique for determination of optical properties from the near-infrared to x-ray regions of the spectrum.

UR - http://www.scopus.com/inward/record.url?scp=84975608589&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84975608589&partnerID=8YFLogxK

U2 - 10.1364/AO.26.001235

DO - 10.1364/AO.26.001235

M3 - Article

AN - SCOPUS:84975608589

VL - 26

SP - 1235

EP - 1239

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 7

ER -

Influence of ion assistance on the optical properties of MgF2

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this