In-channel micromechanical plate interacting with fluid flow

D. A. Czaplewski, B. Ilic, M. Zalalutdinov, W. L. Olbricht, A. T. Zehnder, H. G. Craighead, T. A. Michalske

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have studied the interaction of fluid with a suspended micromechanical plate encapsulated in a fluidic channel. Fluid flowed into the channel at a flow rate of 4.2 microliters/minute and the deformation of the plate observed using optical deflection means. The flow was modeled as Hagen-Poiseuille flow and the forces on the plate were calculated from the steady state solution for incompressible and isothermal flow in a square duct. FEM simulations of the plate predict an angular deflection of 2 × 10-5 radians while the observed deflection of the plate was 2.3 × 10-4 radians.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages392-395
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Keywords

  • Ducts
  • Fluid flow
  • Isothermal processes
  • Microfluidics
  • Micromechanical devices
  • Physics
  • Silicon
  • Steady-state
  • Stress
  • Viscosity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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