@inproceedings{b450583caf7b4645af792d7360c53876,
title = "In-channel micromechanical plate interacting with fluid flow",
abstract = "We have studied the interaction of fluid with a suspended micromechanical plate encapsulated in a fluidic channel. Fluid flowed into the channel at a flow rate of 4.2 microliters/minute and the deformation of the plate observed using optical deflection means. The flow was modeled as Hagen-Poiseuille flow and the forces on the plate were calculated from the steady state solution for incompressible and isothermal flow in a square duct. FEM simulations of the plate predict an angular deflection of 2 × 10-5 radians while the observed deflection of the plate was 2.3 × 10-4 radians.",
keywords = "Ducts, Fluid flow, Isothermal processes, Microfluidics, Micromechanical devices, Physics, Silicon, Steady-state, Stress, Viscosity",
author = "Czaplewski, {D. A.} and B. Ilic and M. Zalalutdinov and Olbricht, {W. L.} and Zehnder, {A. T.} and Craighead, {H. G.} and Michalske, {T. A.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE. Copyright: Copyright 2015 Elsevier B.V., All rights reserved.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215336",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "392--395",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}