High resolution electron beam nanofabrication

Research output: Contribution to conference › Paper › peer-review

Original language	English (US)
DOIs	https://doi.org/10.1109/EDMS.1994.771099
State	Published - Jan 1 1994
Event	1994 International Electron Devices and Materials Symposium, EDMS 1994 - Hsinchu, Taiwan, Province of China Duration: Jul 12 1994 → Jul 15 1994

Other	1994 International Electron Devices and Materials Symposium, EDMS 1994
Country/Territory	Taiwan, Province of China
City	Hsinchu
Period	7/12/94 → 7/15/94

ASJC Scopus subject areas

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title = "High resolution electron beam nanofabrication",

author = "Craighead, {Harold G.}",

year = "1994",

month = jan,

day = "1",

doi = "10.1109/EDMS.1994.771099",

language = "English (US)",

note = "1994 International Electron Devices and Materials Symposium, EDMS 1994 ; Conference date: 12-07-1994 Through 15-07-1994",

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T2 - 1994 International Electron Devices and Materials Symposium, EDMS 1994

Y2 - 12 July 1994 through 15 July 1994

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