HIGH REFLECTANCE MgF//2-COATED VUV MIRRORS.

O. R. Wood; P. J. Maloney; J. M. Phillips; H. G. Craighead

HIGH REFLECTANCE MgF//2-COATED VUV MIRRORS.

O. R. Wood, P. J. Maloney, J. M. Phillips, H. G. Craighead

Research output: Contribution to journal › Article › peer-review

Abstract

Potential applications of short-wavelength laser sources in fields such as spectroscopy and semiconductor processing would benefit from improved mirror performance. Rapid thermal annealing of MgF//2-overcoated aluminum mirrors has been found to increase reflectances significantly in a range of wavelengths below 140 nm. The technique is simple and widely applicable.

Original language	English (US)
Pages (from-to)	4p between p 98 and 104
Journal	Laser Focus (Littleton, Massachusetts)
Volume	23
Issue number	6
State	Published - Jun 1987

ASJC Scopus subject areas

Engineering(all)

Cite this

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title = "HIGH REFLECTANCE MgF//2-COATED VUV MIRRORS.",

abstract = "Potential applications of short-wavelength laser sources in fields such as spectroscopy and semiconductor processing would benefit from improved mirror performance. Rapid thermal annealing of MgF//2-overcoated aluminum mirrors has been found to increase reflectances significantly in a range of wavelengths below 140 nm. The technique is simple and widely applicable.",

author = "Wood, {O. R.} and Maloney, {P. J.} and Phillips, {J. M.} and Craighead, {H. G.}",

year = "1987",

month = jun,

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journal = "Laser Focus (Littleton, Massachusetts)",

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AU - Phillips, J. M.

AU - Craighead, H. G.

PY - 1987/6

Y1 - 1987/6

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AB - Potential applications of short-wavelength laser sources in fields such as spectroscopy and semiconductor processing would benefit from improved mirror performance. Rapid thermal annealing of MgF//2-overcoated aluminum mirrors has been found to increase reflectances significantly in a range of wavelengths below 140 nm. The technique is simple and widely applicable.

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SN - 0740-2511

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HIGH REFLECTANCE MgF//2-COATED VUV MIRRORS.

Abstract

ASJC Scopus subject areas

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