HIGH REFLECTANCE MgF//2-COATED VUV MIRRORS.

O. R. Wood, P. J. Maloney, J. M. Phillips, H. G. Craighead

Research output: Contribution to journalArticle

Abstract

Potential applications of short-wavelength laser sources in fields such as spectroscopy and semiconductor processing would benefit from improved mirror performance. Rapid thermal annealing of MgF//2-overcoated aluminum mirrors has been found to increase reflectances significantly in a range of wavelengths below 140 nm. The technique is simple and widely applicable.

Original languageEnglish (US)
Pages (from-to)4p between p 98 and 104
JournalLaser Focus (Littleton, Massachusetts)
Volume23
Issue number6
StatePublished - Jun 1987

ASJC Scopus subject areas

  • Engineering(all)

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