High-Q nanomechanics via destructive interference of elastic waves

I. Wilson-Rae, R. A. Barton, S. S. Verbridge, D. R. Southworth, B. Ilic, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticlepeer-review

69 Scopus citations


Mechanical dissipation poses a ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test it on Si3N4 membranes with circular and square geometries. The measured Q values of different harmonics present a nonmonotonic behavior which is successfully explained. For azimuthal harmonics of the circular geometry we predict that destructive interference of the radiated waves leads to an exponential suppression of the clamping loss in the harmonic index. Our model can also be applied to graphene drums under high tension.

Original languageEnglish (US)
Article number047205
JournalPhysical Review Letters
Issue number4
StatePublished - Jan 27 2011

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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