High- Q, in-plane modes of nanomechanical resonators operated in air

Philip S. Waggoner; Christine P. Tan; Leon Bellan; Harold G. Craighead

doi:10.1063/1.3123767

High- Q, in-plane modes of nanomechanical resonators operated in air

Philip S. Waggoner, Christine P. Tan, Leon Bellan, Harold G. Craighead

Research output: Contribution to journal › Article

21 Scopus citations

Abstract

Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.

Original language	English (US)
Article number	094315
Journal	Journal of Applied Physics
Volume	105
Issue number	9
DOIs	https://doi.org/10.1063/1.3123767
State	Published - 2009

ASJC Scopus subject areas

Physics and Astronomy(all)

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abstract = "Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.",

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AU - Tan, Christine P.

AU - Bellan, Leon

AU - Craighead, Harold G.

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AB - Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.

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