High- Q, in-plane modes of nanomechanical resonators operated in air

Philip S. Waggoner; Christine P. Tan; Leon Bellan; Harold G. Craighead

doi:10.1063/1.3123767

High- Q, in-plane modes of nanomechanical resonators operated in air

Philip S. Waggoner, Christine P. Tan, Leon Bellan, Harold G. Craighead

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.

Original language	English (US)
Article number	094315
Journal	Journal of Applied Physics
Volume	105
Issue number	9
DOIs	https://doi.org/10.1063/1.3123767
State	Published - 2009

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.3123767

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@article{d69a76c52c1c4e70b99161c1ceaad277,

title = "High- Q, in-plane modes of nanomechanical resonators operated in air",

abstract = "Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.",

author = "Waggoner, {Philip S.} and Tan, {Christine P.} and Leon Bellan and Craighead, {Harold G.}",

note = "Funding Information: We thank Darren Southworth and Ben Cipriany for useful discussions. Device fabrication was performed in the Cornell NanoScale Facility, which is supported by the National Science Foundation. Polymer evaporation took place at the Cornell Center for Materials Research, supported primarily by the National Science Foundation (Grant No. DMR 0520404). Copyright: Copyright 2009 Elsevier B.V., All rights reserved.",

year = "2009",

doi = "10.1063/1.3123767",

language = "English (US)",

volume = "105",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "9",

}

TY - JOUR

T1 - High- Q, in-plane modes of nanomechanical resonators operated in air

AU - Waggoner, Philip S.

AU - Tan, Christine P.

AU - Bellan, Leon

AU - Craighead, Harold G.

N1 - Funding Information: We thank Darren Southworth and Ben Cipriany for useful discussions. Device fabrication was performed in the Cornell NanoScale Facility, which is supported by the National Science Foundation. Polymer evaporation took place at the Cornell Center for Materials Research, supported primarily by the National Science Foundation (Grant No. DMR 0520404). Copyright: Copyright 2009 Elsevier B.V., All rights reserved.

PY - 2009

Y1 - 2009

N2 - Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.

AB - Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.

UR - http://www.scopus.com/inward/record.url?scp=67249158736&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=67249158736&partnerID=8YFLogxK

U2 - 10.1063/1.3123767

DO - 10.1063/1.3123767

M3 - Article

AN - SCOPUS:67249158736

VL - 105

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 9

M1 - 094315

ER -

High- Q, in-plane modes of nanomechanical resonators operated in air

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