Fluidic structures were fabricated by exposing a heat-depolymerizable polycarbonate directly with an electron beam and using it as a sacrificial layer. Structures were capped by sputtered oxide deposited below 250°C. A substrate with silicon nitride membranes was developed to provide a very smooth surface for processing the 140 nm HDP layer, and to allow venting and fluid ports to be opened under the fluidic structures near the end of the process. Tubes and two-dimensional column structures were fabricated by baking the temporary HDP support out from under the column layer.
|Original language||English (US)|
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Nov 2001|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering