Filtration of Sub-100 nm Particles Using a Bulk-Micromachined, Direct-Bonded Silicon Filter

Jay K. Tu, Tony Huen, Robert Szema, Mauro Ferrari

Research output: Contribution to journalArticle

25 Scopus citations

Abstract

For successful size separation in biomedical applications, the filter used must meet several strict criteria. Not only must it have precisely-machined sub-100nm pores ( < 5% variation), but it must also be able to handle large and small volumes with very high reduction ratios ( > 104). In this paper, we will present a bulkmicromachined, direct-bonded silicon nanofilter that can remove particles as small as 44nm. In doing so, we will describe the fabrication, the gas and liquid characterization, and the filtrations studies done on 44 nm and 100 nm beads.

Original languageEnglish (US)
Pages (from-to)113-119
Number of pages7
JournalBiomedical Microdevices
Volume1
Issue number2
DOIs
StatePublished - 1999

Keywords

  • BioMEMS
  • Bioseparation
  • Filter
  • MEMS
  • Micromachining

ASJC Scopus subject areas

  • Medicine (miscellaneous)
  • Genetics
  • Neuroscience(all)

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