Fabrication of flexible polymer tubes for micro and nanofluidic applications

B. Ilic, D. Czaplewski, M. Zalalutdinov, B. Schmidt, H. G. Craighead

Research output: Contribution to journalArticlepeer-review

43 Scopus citations


Using standard lithographic processes, a fluidic fabrication approach combining reactive ion etching and conformal deposition of an inert polymer to construct flexible tubes with a wide range of dimensions down to the submicrometer region was established. Polymeric Parylene channels with widths below 1 μm were fabricated into etched silicon templates. Channels were formed in templates with a variety of cross-sectional profiles, including vertical and reentrant profiles. The Parylene polymer served to demonstrate that the process is chemically inert and biocompatible. Its transparency was also shown to allow for optical sample detection.

Original languageEnglish (US)
Pages (from-to)2459-2465
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number6
StatePublished - Nov 2002

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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