Using standard lithographic processes, a fluidic fabrication approach combining reactive ion etching and conformal deposition of an inert polymer to construct flexible tubes with a wide range of dimensions down to the submicrometer region was established. Polymeric Parylene channels with widths below 1 μm were fabricated into etched silicon templates. Channels were formed in templates with a variety of cross-sectional profiles, including vertical and reentrant profiles. The Parylene polymer served to demonstrate that the process is chemically inert and biocompatible. Its transparency was also shown to allow for optical sample detection.
|Original language||English (US)|
|Number of pages||7|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Nov 2002|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering