Fabrication of flexible polymer tubes for micro and nanofluidic applications

B. Ilic; D. Czaplewski; M. Zalalutdinov; B. Schmidt; H. G. Craighead

doi:10.1116/1.1526356

Fabrication of flexible polymer tubes for micro and nanofluidic applications

B. Ilic, D. Czaplewski, M. Zalalutdinov, B. Schmidt, H. G. Craighead

Research output: Contribution to journal › Article › peer-review

43 Scopus citations

Abstract

Using standard lithographic processes, a fluidic fabrication approach combining reactive ion etching and conformal deposition of an inert polymer to construct flexible tubes with a wide range of dimensions down to the submicrometer region was established. Polymeric Parylene channels with widths below 1 μm were fabricated into etched silicon templates. Channels were formed in templates with a variety of cross-sectional profiles, including vertical and reentrant profiles. The Parylene polymer served to demonstrate that the process is chemically inert and biocompatible. Its transparency was also shown to allow for optical sample detection.

Original language	English (US)
Pages (from-to)	2459-2465
Number of pages	7
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1526356
State	Published - Nov 2002

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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AU - Czaplewski, D.

AU - Zalalutdinov, M.

AU - Schmidt, B.

AU - Craighead, H. G.

PY - 2002/11

Y1 - 2002/11

N2 - Using standard lithographic processes, a fluidic fabrication approach combining reactive ion etching and conformal deposition of an inert polymer to construct flexible tubes with a wide range of dimensions down to the submicrometer region was established. Polymeric Parylene channels with widths below 1 μm were fabricated into etched silicon templates. Channels were formed in templates with a variety of cross-sectional profiles, including vertical and reentrant profiles. The Parylene polymer served to demonstrate that the process is chemically inert and biocompatible. Its transparency was also shown to allow for optical sample detection.

AB - Using standard lithographic processes, a fluidic fabrication approach combining reactive ion etching and conformal deposition of an inert polymer to construct flexible tubes with a wide range of dimensions down to the submicrometer region was established. Polymeric Parylene channels with widths below 1 μm were fabricated into etched silicon templates. Channels were formed in templates with a variety of cross-sectional profiles, including vertical and reentrant profiles. The Parylene polymer served to demonstrate that the process is chemically inert and biocompatible. Its transparency was also shown to allow for optical sample detection.

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Fabrication of flexible polymer tubes for micro and nanofluidic applications

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