With careful process control and a finely focused electron beam it is possible to lithographically produce structures with dimensions on the order of tens of nanometers. We have used a high resolution scanning electron microscope to perform experiments on the lithographic process and to fabricate ultrasmall structures for physics measurements. This paper presents a review of techniques and fabricated structure along with a discussion of electron scattering and materials consideration that limit the lithographic resolution.
|Original language||English (US)|
|Number of pages||2|
|Journal||American Chemical Society, Polymer Preprints, Division of Polymer Chemistry|
|State||Published - Sep 1 1985|
ASJC Scopus subject areas
- Polymers and Plastics