Electromechanical resonators from graphene sheets

J. Scott Bunch; Arend M. Van Der Zande; Scott S. Verbridge; Ian W. Frank; David M. Tanenbaum; Jeevak M. Parpia; Harold G. Craighead; Paul L. McEuen

doi:10.1126/science.1136836

Electromechanical resonators from graphene sheets

J. Scott Bunch, Arend M. Van Der Zande, Scott S. Verbridge, Ian W. Frank, David M. Tanenbaum, Jeevak M. Parpia, Harold G. Craighead, Paul L. McEuen

Research output: Contribution to journal › Article › peer-review

2695 Scopus citations

Abstract

Nanoelectromechanical systems were fabricated from single- and multilayer graphene sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide. Vibrations with fundamental resonant frequencies in the megahertz range are actuated either optically or electrically and detected optically by interferometry. We demonstrate room-temperature charge sensitivities down to 8 × 10^-4 electrons per root hertz. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of two-dimensional nanoelectromechanical systems.

Original language	English (US)
Pages (from-to)	490-493
Number of pages	4
Journal	Science
Volume	315
Issue number	5811
DOIs	https://doi.org/10.1126/science.1136836
State	Published - Jan 26 2007

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AU - Bunch, J. Scott

AU - Van Der Zande, Arend M.

AU - Verbridge, Scott S.

AU - Frank, Ian W.

AU - Tanenbaum, David M.

AU - Parpia, Jeevak M.

AU - Craighead, Harold G.

AU - McEuen, Paul L.

PY - 2007/1/26

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AB - Nanoelectromechanical systems were fabricated from single- and multilayer graphene sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide. Vibrations with fundamental resonant frequencies in the megahertz range are actuated either optically or electrically and detected optically by interferometry. We demonstrate room-temperature charge sensitivities down to 8 × 10-4 electrons per root hertz. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of two-dimensional nanoelectromechanical systems.

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Electromechanical resonators from graphene sheets

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