Effects of air on enclosure design of lead-zirconate-titanate (pzt) thin-film diaphragm microactuators

Chuan Luo, Kai Yi Hsiao, Perry Cheung, Howard Lin, Amy Q. Shen, G. Z. Cao, I. Y. Shen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Mathematics

Engineering & Materials Science