TY - GEN
T1 - Effects of air on enclosure design of lead-zirconate-titanate (pzt) thin-film diaphragm microactuators
AU - Luo, Chuan
AU - Hsiao, Kai Yi
AU - Cheung, Perry
AU - Lin, Howard
AU - Shen, A. Q.
AU - Cao, G. Z.
AU - Shen, I. Y.
PY - 2012
Y1 - 2012
N2 - In this paper, we evaluate performance of two types of piezoelectric diaphragm micro-actuators: open-end design and closed-end design. In the open-end design, the micro-actuator consists of a base silicon diaphragm, a layer of bottom electrode, a layer of lead-zirconate-titanate (PZT) thin film, and a layer of top electrode. The diaphragm is anchored on a silicon substrate by etching the silicon substrate from the back to form a cavity under the diaphragm. In the closed-end design, the bottom of the cavity is sealed with a piece of glass, silicon or PDMS. Experimental results show that the measured displacements from the closed-end design are always 5%-30% lower than those from the open-end design. To explain the experimental results, we hypothesize that the air inside the cavity of the closed-end design behaves like an elastic spring increasing the stiffness of the closed-end design. To confirm the hypothesis, we estimate the stiffness of the air by modeling the air as an ideal gas with a constant temperature. We also.
AB - In this paper, we evaluate performance of two types of piezoelectric diaphragm micro-actuators: open-end design and closed-end design. In the open-end design, the micro-actuator consists of a base silicon diaphragm, a layer of bottom electrode, a layer of lead-zirconate-titanate (PZT) thin film, and a layer of top electrode. The diaphragm is anchored on a silicon substrate by etching the silicon substrate from the back to form a cavity under the diaphragm. In the closed-end design, the bottom of the cavity is sealed with a piece of glass, silicon or PDMS. Experimental results show that the measured displacements from the closed-end design are always 5%-30% lower than those from the open-end design. To explain the experimental results, we hypothesize that the air inside the cavity of the closed-end design behaves like an elastic spring increasing the stiffness of the closed-end design. To confirm the hypothesis, we estimate the stiffness of the air by modeling the air as an ideal gas with a constant temperature. We also.
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U2 - 10.1115/DETC2012-70061
DO - 10.1115/DETC2012-70061
M3 - Conference contribution
AN - SCOPUS:84884611680
SN - 9780791845042
T3 - Proceedings of the ASME Design Engineering Technical Conference
SP - 41
EP - 47
BT - 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012
Y2 - 12 August 2012 through 12 August 2012
ER -