Effects of air on enclosure design of lead-zirconate-titanate (pzt) thin-film diaphragm microactuators

Chuan Luo, Kai Yi Hsiao, Perry Cheung, Howard Lin, A. Q. Shen, G. Z. Cao, I. Y. Shen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we evaluate performance of two types of piezoelectric diaphragm micro-actuators: open-end design and closed-end design. In the open-end design, the micro-actuator consists of a base silicon diaphragm, a layer of bottom electrode, a layer of lead-zirconate-titanate (PZT) thin film, and a layer of top electrode. The diaphragm is anchored on a silicon substrate by etching the silicon substrate from the back to form a cavity under the diaphragm. In the closed-end design, the bottom of the cavity is sealed with a piece of glass, silicon or PDMS. Experimental results show that the measured displacements from the closed-end design are always 5%-30% lower than those from the open-end design. To explain the experimental results, we hypothesize that the air inside the cavity of the closed-end design behaves like an elastic spring increasing the stiffness of the closed-end design. To confirm the hypothesis, we estimate the stiffness of the air by modeling the air as an ideal gas with a constant temperature. We also.

Original languageEnglish (US)
Title of host publicationASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012
Pages41-47
Number of pages7
DOIs
StatePublished - 2012
EventASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012 - Chicago, IL, United States
Duration: Aug 12 2012Aug 12 2012

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume5

Other

OtherASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012
Country/TerritoryUnited States
CityChicago, IL
Period8/12/128/12/12

ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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