Dynamic response of microcantilever-based sensors in a fluidic chamber

P. Decuzzi, A. Granaldi, G. Pascazio

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


The dynamic response of a microcantilever beam used as a transducer in a biomechanical sensor for molecule detection is analyzed. The cantilever motion is modeled using the classical Euler-Bernoulli beam theory coupled to the Reynolds equation of lubrication accounting for the hydrodynamic interactions. The beam is oscillated by an electrostatic harmonic force in close proximity to a rigid wall in an analysis chamber. It is shown that the dynamic response of the beam can be accurately predicted by a simple equivalent damped harmonic oscillator whose quality factor has been estimated as a function of the beam-wall gap. As the gap is reduced the quality factor is reduced and damping becomes more and more important. A transduction relationship between the frequency shift and the mass of molecules adherent on the beam is proposed which accounts for the beam-fluid-substrate interactions.

Original languageEnglish (US)
Article number024303
JournalJournal of Applied Physics
Issue number2
StatePublished - 2007
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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