Dynamic characterization of nano oscillators by atomic force microscopy

B. Ilic, S. Krylova, L. M. Bellan, H. G. Craighead

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We report on the dynamic quantitative characterization of nanoelectromechanical systems (NEMS) through direct coupling with a micromechanical (MEMS) probe. The nanomechanical structures were driven using piezoelectric transducers and the resulting out-of-plane vibrations were monitored with a conventional commercially available atomic force microscope (AFM) probe. Intermittent contact imaging data and non-contact AFM interrogation revealed the initiation of interaction between the two oscillators, providing a description of the resonant response. The vibrational spectra measured through optical detection was in good agreement with the coupled NEMS-AFM system measurement results. The dynamic response of the coupled system was modelled through a combination of long range van der Waals and contact forces using the Derjaguin-Muller-Toporov model.

Original languageEnglish (US)
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages95-98
Number of pages4
ISBN (Print)1424409519, 9781424409518
DOIs
StatePublished - 2007
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: Jan 21 2007Jan 25 2007

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period1/21/071/25/07

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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