@inproceedings{7917decf3d18463ba5a304c506ac6c80,
title = "Dynamic characterization of nano oscillators by atomic force microscopy",
abstract = "We report on the dynamic quantitative characterization of nanoelectromechanical systems (NEMS) through direct coupling with a micromechanical (MEMS) probe. The nanomechanical structures were driven using piezoelectric transducers and the resulting out-of-plane vibrations were monitored with a conventional commercially available atomic force microscope (AFM) probe. Intermittent contact imaging data and non-contact AFM interrogation revealed the initiation of interaction between the two oscillators, providing a description of the resonant response. The vibrational spectra measured through optical detection was in good agreement with the coupled NEMS-AFM system measurement results. The dynamic response of the coupled system was modelled through a combination of long range van der Waals and contact forces using the Derjaguin-Muller-Toporov model.",
author = "B. Ilic and S. Krylova and Bellan, {L. M.} and Craighead, {H. G.}",
year = "2007",
doi = "10.1109/memsys.2007.4433023",
language = "English (US)",
isbn = "1424409519",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "95--98",
booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",
address = "United States",
note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",
}