Diamond materials for MEMS and NEMS structures and devices

J. E. Butler, T. Feygelson, L. Sekaric, Harold G. Craighead, J. Wang, C. T.C. Nguyen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

Diamond materials offer great potential for many microelectro-mechanical system (MEMS) and nano-electromechanical systems (NEMS) applications. Amongst the attractive technological properties of diamond materials are the high stiffness, thermal conductivity, optical transparency range, chemical stability and erosion resistance, and dopant controlled variable electrical resistivity. The nucleation and growth by microwave plasma chemical vapor deposition of conformal nano-crystalline diamond (NCD) films ranging in thickness from 100 nm to 5 microns, and the fabrication of MEMS and NEMS structures integrated with Si based substrates are presented. These nano-crystalline films have been shown to have high optical quality, high thermal conductivity and a Young's modulus nearly that of single crystal diamond. The results of various characterizations of the material quality will be given, along with examples of several MEMS and NEMS structures and devices.

Original languageEnglish (US)
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages474-477
Number of pages4
Volume1
StatePublished - Dec 1 2003
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: Feb 23 2003Feb 27 2003

Other

Other2003 Nanotechnology Conference and Trade Show - Nanotech 2003
CountryUnited States
CitySan Francisco, CA
Period2/23/032/27/03

Keywords

  • Diamond
  • MEMS
  • NEMS
  • Resonators

ASJC Scopus subject areas

  • Engineering(all)

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