@inproceedings{d9b4223bd9e8489aab2dca1913b2ab21,
title = "Diamond materials for MEMS and NEMS structures and devices",
abstract = "Diamond materials offer great potential for many microelectro-mechanical system (MEMS) and nano-electromechanical systems (NEMS) applications. Amongst the attractive technological properties of diamond materials are the high stiffness, thermal conductivity, optical transparency range, chemical stability and erosion resistance, and dopant controlled variable electrical resistivity. The nucleation and growth by microwave plasma chemical vapor deposition of conformal nano-crystalline diamond (NCD) films ranging in thickness from 100 nm to 5 microns, and the fabrication of MEMS and NEMS structures integrated with Si based substrates are presented. These nano-crystalline films have been shown to have high optical quality, high thermal conductivity and a Young's modulus nearly that of single crystal diamond. The results of various characterizations of the material quality will be given, along with examples of several MEMS and NEMS structures and devices.",
keywords = "Diamond, MEMS, NEMS, Resonators",
author = "Butler, {J. E.} and T. Feygelson and L. Sekaric and H. Craighead and J. Wang and Nguyen, {C. T.C.}",
year = "2003",
language = "English (US)",
isbn = "0972842209",
series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
pages = "474--477",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",
}