Development of an optically transparent silicon based technology platform for biological analysis

Nigel Davies, Huw D. Summers, Mark D. Holton, Martyn Rowan Brown, John W. Wills, Paul M. Holland

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


A prototype optical structure suitable for advanced biological investigation has been successfully manufactured using plasma-enhanced chemical vapor deposition and deep reactive-ion etching techniques. Our approach to the design and fabrication of the structure is such that it can easily be integrated onto a lab-on-a-chip cell positioning platform, combining the use of integrated circuit technology with optimal in situ analysis of cells through the substrate using high-resolution inverted microscope systems. This paper describes the concept, design, fabrication, and optical characterization of a transparent window and corresponding via, which extends from the top surface to bottom surface of a silicon wafer. The effectiveness of the platform is demonstrated in multicolor fluorescence imaging of cells, cultured on-chip, using an inverted, confocal microscope.

Original languageEnglish (US)
Article number6949124
Pages (from-to)1849-1857
Number of pages9
JournalIEEE Sensors Journal
Issue number3
StatePublished - Mar 1 2015


  • CMOS
  • Dielectrophoresis (DEP)
  • lab-on-a-chip (LoC)
  • on-chip imaging
  • on-chip microscopy

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering


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