Development of an optically transparent silicon based technology platform for biological analysis

Nigel Davies, Huw Summers, Mark D. Holton, Martyn Rowan Brown, John W. Wills, Paul M. Holland

Research output: Contribution to journalArticle

Abstract

A prototype optical structure suitable for advanced biological investigation has been successfully manufactured using plasma-enhanced chemical vapor deposition and deep reactive-ion etching techniques. Our approach to the design and fabrication of the structure is such that it can easily be integrated onto a lab-on-a-chip cell positioning platform, combining the use of integrated circuit technology with optimal in situ analysis of cells through the substrate using high-resolution inverted microscope systems. This paper describes the concept, design, fabrication, and optical characterization of a transparent window and corresponding via, which extends from the top surface to bottom surface of a silicon wafer. The effectiveness of the platform is demonstrated in multicolor fluorescence imaging of cells, cultured on-chip, using an inverted, confocal microscope.

Original languageEnglish (US)
Article number6949124
Pages (from-to)1849-1857
Number of pages9
JournalIEEE Sensors Journal
Volume15
Issue number3
DOIs
StatePublished - Mar 1 2015

Keywords

  • CMOS
  • Dielectrophoresis (DEP)
  • lab-on-a-chip (LoC)
  • on-chip imaging
  • on-chip microscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

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