Determination of density and young's modulus of atomic layer deposited thin films by resonant frequency measurements of optically excited nanocantilevers

Engineering & Materials Science

• Nanocantilevers 100%
• Ultrathin films 82%
• Atomic layer deposition 78%
• Single crystals 59%
• Alumina 50%
• Thin films 48%
• Scattering 48%
• Compliance 45%
• Elastic moduli 43%
• Natural frequencies 43%
• Experiments 18%

Physics & Astronomy

• frequency measurement 59%
• atomic layer epitaxy 53%
• frequency shift 49%
• resonant frequencies 45%
• aluminum oxides 41%
• methodology 41%
• modulus of elasticity 41%
• single crystals 31%
• sensitivity 30%
• predictions 27%
• thin films 26%
• scattering 26%

Chemistry

• Ultrathin Film 63%
• Compliance 62%
• Atomic Layer Epitaxy 59%
• Young's Modulus 54%
• Resonance 40%
• Single Crystalline Solid 36%