Determination of density and young's modulus of atomic layer deposited thin films by resonant frequency measurements of optically excited nanocantilevers

B. Llic, S. Krylov, Harold G. Craighead

Research output: Contribution to journalConference article

3 Scopus citations

Abstract

We report on a methodology for simultaneous determination of the young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferrometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nano cantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured at the same structure reducing sensitivity to scattering in geometric parameters and clamping compliances. Experimental results obtained for A1203 (alumina) and HfO2 (hafnia) were consistent with the model predictions and the data available in literature.

Original languageEnglish (US)
Article number4805466
Pages (from-to)650-653
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
StatePublished - Jun 1 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: Jan 25 2009Jan 29 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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