Determination of density and young's modulus of atomic layer deposited thin films by resonant frequency measurements of optically excited nanocantilevers

B. Llic; S. Krylov; Harold G. Craighead

doi:10.1109/MEMSYS.2009.4805466

Determination of density and young's modulus of atomic layer deposited thin films by resonant frequency measurements of optically excited nanocantilevers

B. Llic, S. Krylov, Harold G. Craighead

Houston Methodist

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

We report on a methodology for simultaneous determination of the young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferrometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nano cantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured at the same structure reducing sensitivity to scattering in geometric parameters and clamping compliances. Experimental results obtained for A1203 (alumina) and HfO2 (hafnia) were consistent with the model predictions and the data available in literature.

Original language	English (US)
Article number	4805466
Pages (from-to)	650-653
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805466
State	Published - Jun 1 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2009.4805466

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Determination of density and young's modulus of atomic layer deposited thin films by resonant frequency measurements of optically excited nanocantilevers. / Llic, B.; Krylov, S.; Craighead, Harold G.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 01.06.2009, p. 650-653.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "We report on a methodology for simultaneous determination of the young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferrometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nano cantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured at the same structure reducing sensitivity to scattering in geometric parameters and clamping compliances. Experimental results obtained for A1203 (alumina) and HfO2 (hafnia) were consistent with the model predictions and the data available in literature.",

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AU - Krylov, S.

AU - Craighead, Harold G.

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N2 - We report on a methodology for simultaneous determination of the young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferrometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nano cantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured at the same structure reducing sensitivity to scattering in geometric parameters and clamping compliances. Experimental results obtained for A1203 (alumina) and HfO2 (hafnia) were consistent with the model predictions and the data available in literature.

AB - We report on a methodology for simultaneous determination of the young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferrometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nano cantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured at the same structure reducing sensitivity to scattering in geometric parameters and clamping compliances. Experimental results obtained for A1203 (alumina) and HfO2 (hafnia) were consistent with the model predictions and the data available in literature.

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Determination of density and young's modulus of atomic layer deposited thin films by resonant frequency measurements of optically excited nanocantilevers

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