TY - JOUR
T1 - Deposition and growth with desorption for CdTe molecular beam epitaxy
AU - Peyla, Philippe
AU - Pimpinelli, Alberto
AU - Cibert, Joël
AU - Tatarenko, Serge
PY - 1998/1/1
Y1 - 1998/1/1
N2 - It is well known that during epitaxial growth of thin films of almost all II-VI semiconductors, the growth rates show a pronounced temperature dependence which is due to desorption of one or both components from the growing surface. The measured desorption rate appears to be thermally activated with a strikingly small value: a few tenths of an eV. The explanation generally put forward is that the desorption of a weak-binding state acts as a "precursor" to chemisorption. According to this point of view, the small measured activation energy is a real energy corresponding to a well-defined microscopic process. We argue that no weak-binding precursor state is needed for reproducing the experimental growth rate of CdTe. Using Burton, Cabrera and Frank's theory and by performing Monte Carlo simulations of a one-particle model for deposition, diffusion, aggregation and desorption, we have found that the macroscopic desorption rate appears to be thermally activated over a large range of temperatures. This rate is a combination of all the microscopic energies - diffusion barrier and desorption barrier - and it can take values of a few tenths of an electronvolt, even though all microscopic energies are much larger. A very simplified model of CdTe growth is thus proposed and tested against experimental measurements of growth rates for various temperatures and deposition fluxes
AB - It is well known that during epitaxial growth of thin films of almost all II-VI semiconductors, the growth rates show a pronounced temperature dependence which is due to desorption of one or both components from the growing surface. The measured desorption rate appears to be thermally activated with a strikingly small value: a few tenths of an eV. The explanation generally put forward is that the desorption of a weak-binding state acts as a "precursor" to chemisorption. According to this point of view, the small measured activation energy is a real energy corresponding to a well-defined microscopic process. We argue that no weak-binding precursor state is needed for reproducing the experimental growth rate of CdTe. Using Burton, Cabrera and Frank's theory and by performing Monte Carlo simulations of a one-particle model for deposition, diffusion, aggregation and desorption, we have found that the macroscopic desorption rate appears to be thermally activated over a large range of temperatures. This rate is a combination of all the microscopic energies - diffusion barrier and desorption barrier - and it can take values of a few tenths of an electronvolt, even though all microscopic energies are much larger. A very simplified model of CdTe growth is thus proposed and tested against experimental measurements of growth rates for various temperatures and deposition fluxes
KW - Desorption
KW - Growth rate
KW - II-VI
KW - MBE
UR - http://www.scopus.com/inward/record.url?scp=11544365721&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=11544365721&partnerID=8YFLogxK
U2 - 10.1016/S0022-0248(98)80297-2
DO - 10.1016/S0022-0248(98)80297-2
M3 - Article
AN - SCOPUS:11544365721
SN - 0022-0248
VL - 184-185
SP - 75
EP - 79
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
ER -