Abstract
Crystal growth by particle deposition on a vicinal surface is studied by kinetic Monte Carlo simulations as a model for molecular beam epitaxy. In particular, the crossover between step flow and layer-by-layer growth during thick film deposition is investigated as a function of the atom deposition rate F, temperature and step-step distance d. The crossover scaling function for the island density is derived analytically by coupling rate equations to the Burton, Cabrera and Frank theory for step flow.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3647-3655 |
| Number of pages | 9 |
| Journal | International Journal of Modern Physics B |
| Volume | 11 |
| Issue number | 31 |
| DOIs | |
| State | Published - Dec 20 1997 |
ASJC Scopus subject areas
- Statistical and Nonlinear Physics
- Condensed Matter Physics