Crystal growth by particle deposition on a vicinal surface is studied by kinetic Monte Carlo simulations as a model for molecular beam epitaxy. In particular, the crossover between step flow and layer-by-layer growth during thick film deposition is investigated as a function of the atom deposition rate F, temperature and step-step distance d. The crossover scaling function for the island density is derived analytically by coupling rate equations to the Burton, Cabrera and Frank theory for step flow.
ASJC Scopus subject areas
- Statistical and Nonlinear Physics
- Condensed Matter Physics