CONTACT LITHOGRAPHY AT 157 nm WITH AN F2 EXCIMER LASER.

H. G. Craighead, J. C. White, R. E. Howard, L. D. Jackel, R. E. Behringer, J. E. Sweeney, R. W. Epworth

Research output: Contribution to journal › Conference article › peer-review

30 Scopus citations

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