Contact lithography at 157 nm with an F2 excimer laser

H. G. Craighead, J. C.white, R. E. Howard, L. D. Jackel

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Article number	FF4
Journal	Optics InfoBase Conference Papers
State	Published - 1983
Event	Conference on Lasers and Electro-Optics, CLEO 1983 - Baltimore, United States Duration: May 17 1983 → May 20 1983

ASJC Scopus subject areas

@article{8719469747644cc48354981a9b944b4c,

title = "Contact lithography at 157 nm with an F2 excimer laser",

author = "Craighead, {H. G.} and J. C.white and Howard, {R. E.} and Jackel, {L. D.}",

year = "1983",

language = "English (US)",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

note = "Conference on Lasers and Electro-Optics, CLEO 1983 ; Conference date: 17-05-1983 Through 20-05-1983",

}

TY - JOUR

T1 - Contact lithography at 157 nm with an F2 excimer laser

AU - Craighead, H. G.

AU - C.white, J.

AU - Howard, R. E.

AU - Jackel, L. D.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=85136790269&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85136790269&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:85136790269

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - FF4

T2 - Conference on Lasers and Electro-Optics, CLEO 1983

Y2 - 17 May 1983 through 20 May 1983

ER -