@inproceedings{2cd70091885545668ecf1dedf45220f2,
title = "Contact lithography at 157 nm with an F2 excimer laser",
author = "Craighead, {H. G.} and J. C.white and Howard, {R. E.} and Jackel, {L. D.}",
year = "1983",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 1983",
note = "Conference on Lasers and Electro-Optics, CLEO 1983 ; Conference date: 17-05-1983 Through 20-05-1983",
}