Characterization of bulk-micromachined, direct-bonded silicon nanofilters

Jay K. Tu, Tony Huen, Robert Szema, Mauro Ferrari

Research output: Contribution to journalConference articlepeer-review

12 Scopus citations


The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to ±4% for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

Original languageEnglish (US)
Pages (from-to)148-155
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
EventMicro - and Nanofabricated Structures and Devices for Biomedical Environmental Applications - San Jose, CA, United States
Duration: Jan 26 1998Jan 27 1998


  • BioMEMS
  • Bioseparation
  • Microfabrication
  • Micromachining
  • Nanofilters
  • Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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