Abstract
Self-generated vibration of a disk-shaped, single-crystal silicon micromechanical oscillator was observed when the power of a continuous wave laser, focused on the periphery of the disk exceeded a threshold of a few hundred μW. With the laser power set to just below the self-generation threshold, the quality factor for driven oscillations increases by an order of magnitude from Q = 10 000 to Qenh = 110 000. Laser heating-induced thermal stress modulates the effective spring constant via the motion of the disk within the interference pattern of incident and reflected laser beams and provides a mechanism for parametric amplification and self-excitation. Light sources of different wavelengths facilitate both amplification and damping.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 695-697 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 79 |
| Issue number | 5 |
| DOIs | |
| State | Published - Jul 30 2001 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
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