Attogram detection using nanoelectromechanical oscillators

B. Ilic; Harold G. Craighead; S. Krylov; W. Senaratne; C. Ober; P. Neuzil

doi:10.1063/1.1650542

Attogram detection using nanoelectromechanical oscillators

B. Ilic, Harold G. Craighead, S. Krylov, W. Senaratne, C. Ober, P. Neuzil

Research output: Contribution to journal › Article › peer-review

552 Scopus citations

Abstract

The fabrication of nanoelectromechanical oscillators with integrated circular Au contact with subattogram mass detection sensitivity was discussed. Electron beam lithography (EBL) was use to fabricate arrays of both polycrystalline silicon and silicon nitride resonators with evaporated Au contact pads. The mass loading effects of selectively immobilized thiolate molecules to the Au contacts on the surface of the resonator were analyzed. It was observed that the most sensitive position of Au tethering site was near the free end of a cantilever oscillator and the middle point of a bridge oscillator.

Original language	English (US)
Pages (from-to)	3694-3703
Number of pages	10
Journal	Journal of Applied Physics
Volume	95
Issue number	7
DOIs	https://doi.org/10.1063/1.1650542
State	Published - Apr 1 2004

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.1650542

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@article{a7cccbf4be114c9a87e699d2cfccf475,

title = "Attogram detection using nanoelectromechanical oscillators",

abstract = "The fabrication of nanoelectromechanical oscillators with integrated circular Au contact with subattogram mass detection sensitivity was discussed. Electron beam lithography (EBL) was use to fabricate arrays of both polycrystalline silicon and silicon nitride resonators with evaporated Au contact pads. The mass loading effects of selectively immobilized thiolate molecules to the Au contacts on the surface of the resonator were analyzed. It was observed that the most sensitive position of Au tethering site was near the free end of a cantilever oscillator and the middle point of a bridge oscillator.",

author = "B. Ilic and Craighead, {Harold G.} and S. Krylov and W. Senaratne and C. Ober and P. Neuzil",

year = "2004",

month = apr,

day = "1",

doi = "10.1063/1.1650542",

language = "English (US)",

volume = "95",

pages = "3694--3703",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "7",

}

TY - JOUR

T1 - Attogram detection using nanoelectromechanical oscillators

AU - Ilic, B.

AU - Craighead, Harold G.

AU - Krylov, S.

AU - Senaratne, W.

AU - Ober, C.

AU - Neuzil, P.

PY - 2004/4/1

Y1 - 2004/4/1

N2 - The fabrication of nanoelectromechanical oscillators with integrated circular Au contact with subattogram mass detection sensitivity was discussed. Electron beam lithography (EBL) was use to fabricate arrays of both polycrystalline silicon and silicon nitride resonators with evaporated Au contact pads. The mass loading effects of selectively immobilized thiolate molecules to the Au contacts on the surface of the resonator were analyzed. It was observed that the most sensitive position of Au tethering site was near the free end of a cantilever oscillator and the middle point of a bridge oscillator.

AB - The fabrication of nanoelectromechanical oscillators with integrated circular Au contact with subattogram mass detection sensitivity was discussed. Electron beam lithography (EBL) was use to fabricate arrays of both polycrystalline silicon and silicon nitride resonators with evaporated Au contact pads. The mass loading effects of selectively immobilized thiolate molecules to the Au contacts on the surface of the resonator were analyzed. It was observed that the most sensitive position of Au tethering site was near the free end of a cantilever oscillator and the middle point of a bridge oscillator.

UR - http://www.scopus.com/inward/record.url?scp=1942542409&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1942542409&partnerID=8YFLogxK

U2 - 10.1063/1.1650542

DO - 10.1063/1.1650542

M3 - Article

AN - SCOPUS:1942542409

SN - 0021-8979

VL - 95

SP - 3694

EP - 3703

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -

Attogram detection using nanoelectromechanical oscillators

Abstract

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