Attogram detection using nanoelectromechanical oscillators

B. Ilic, Harold G. Craighead, S. Krylov, W. Senaratne, C. Ober, P. Neuzil

Research output: Contribution to journalArticle

508 Scopus citations

Abstract

The fabrication of nanoelectromechanical oscillators with integrated circular Au contact with subattogram mass detection sensitivity was discussed. Electron beam lithography (EBL) was use to fabricate arrays of both polycrystalline silicon and silicon nitride resonators with evaporated Au contact pads. The mass loading effects of selectively immobilized thiolate molecules to the Au contacts on the surface of the resonator were analyzed. It was observed that the most sensitive position of Au tethering site was near the free end of a cantilever oscillator and the middle point of a bridge oscillator.

Original languageEnglish (US)
Pages (from-to)3694-3703
Number of pages10
JournalJournal of Applied Physics
Volume95
Issue number7
DOIs
StatePublished - Apr 1 2004

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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