The fabrication of nanoelectromechanical oscillators with integrated circular Au contact with subattogram mass detection sensitivity was discussed. Electron beam lithography (EBL) was use to fabricate arrays of both polycrystalline silicon and silicon nitride resonators with evaporated Au contact pads. The mass loading effects of selectively immobilized thiolate molecules to the Au contacts on the surface of the resonator were analyzed. It was observed that the most sensitive position of Au tethering site was near the free end of a cantilever oscillator and the middle point of a bridge oscillator.
ASJC Scopus subject areas
- Physics and Astronomy(all)