Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

V. P. Adiga, B. Ilic, R. A. Barton, I. Wilson-Rae, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticle

19 Scopus citations

Fingerprint Dive into the research topics of 'Approaching intrinsic performance in ultra-thin silicon nitride drum resonators'. Together they form a unique fingerprint.

Physics & Astronomy