Anchor loss reduction in resonant MEMS using MESA structures

M. Pandey, R. B. Reichenbach, A. T. Zehnder, Amit Lal, Harold G. Craighead

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The quality factor of an oscillator is inversely proportional to the damping and is a measure of the width of its amplitude vs. forcing frequency response. For sensing and signal processing applications of microelectromechanical systems (MEMS) oscillators, the quality factor (henceforth called Q) affects the sensitivity and performance of such devices. As a MEMS vibrates (resonates) some of its vibrational energy is transmitted to the substrate upon which the MEMS is fabricated. A large component of this energy is carried away as surface acoustic waves (SAW). We demonstrate a design that improves the Q of resonant MEMS oscillators by up to 4× by reflecting surface wave energy back to the MEMS. Wave reflection occurs at trenches fabricated in a circle around the MEMS. The trench creates a "mesa" that provides partial mechanical isolation to the MEMS. The loss of energy due to SAW increases almost exponentially with frequency, with a corresponding decrease in Q. Hence the demonstrated design would become even more useful with the increasing need for higher frequency resonators. The mesa structure presented here is a simple idea which can be easily integrated into existing fabrication procedures and can be used for commercial purposes.

Original languageEnglish (US)
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages880-885
Number of pages6
DOIs
StatePublished - Aug 28 2007
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: Jan 16 2007Jan 19 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period1/16/071/19/07

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

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