TY - JOUR
T1 - Analysis of frequency locking in optically driven MEMS resonators
AU - Pandey, Manoj
AU - Aubin, Keith
AU - Zalalutdinov, Maxim
AU - Reichenbach, Reinchenbach B.
AU - Zehnder, Alan T.
AU - Rand, Richard H.
AU - Craighead, Harold G.
N1 - Funding Information:
Manuscript received January 10, 2005; revised November 4, 2005. This work was supported by the Cornell Center for Material Research (CCMR), part of Materials Science and Engineering Center (MRSEC) of the National Science Foundation (NSF), under Grant DMR-0079992. Subject Editor N. C. Tien. The authors are with the Cornell Center for Materials Research (CCMR), Cornell University, Ithaca, NY 14850 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/JMEMS.2006.879693 Fig. 1. Disk-shaped oscillator. [Right: scanning electron microscope (SEM) image of actual structure].
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006/12
Y1 - 2006/12
N2 - Thin, planar, radio frequency microelectromechanical systems (MEMS) resonators have been shown to self-oscillate in the absence of external forcing when illuminated by a direct current (dc) laser of sufficient amplitude. In the presence of external forcing of sufficient strength and close enough in frequency to that of the unforced oscillation, the device will become frequency locked, or entrained, by the forcing. In other words, it will vibrate at the frequency of the external forcing. Experimental results demonstrating entrainment for a disk-shaped oscillator under optical and mechanical excitation are reviewed. A thermomechanical model of the system is developed and its predictions explored to explain and predict the entrainment phenomenon. The validity of the model is demonstrated by the good agreement between the predicted and experimental results. The model equations could also be used to analyze MEMS limit-cycle oscillators designed to achieve specific performance objectives.
AB - Thin, planar, radio frequency microelectromechanical systems (MEMS) resonators have been shown to self-oscillate in the absence of external forcing when illuminated by a direct current (dc) laser of sufficient amplitude. In the presence of external forcing of sufficient strength and close enough in frequency to that of the unforced oscillation, the device will become frequency locked, or entrained, by the forcing. In other words, it will vibrate at the frequency of the external forcing. Experimental results demonstrating entrainment for a disk-shaped oscillator under optical and mechanical excitation are reviewed. A thermomechanical model of the system is developed and its predictions explored to explain and predict the entrainment phenomenon. The validity of the model is demonstrated by the good agreement between the predicted and experimental results. The model equations could also be used to analyze MEMS limit-cycle oscillators designed to achieve specific performance objectives.
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U2 - 10.1109/JMEMS.2006.879693
DO - 10.1109/JMEMS.2006.879693
M3 - Article
AN - SCOPUS:33845515059
SN - 1057-7157
VL - 15
SP - 1546
EP - 1554
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 6
ER -