Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Antoni S. Gozdz; Harold G. Craighead; Murrae J. Bowden

doi:10.1149/1.2113673

Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Antoni S. Gozdz, Harold G. Craighead, Murrae J. Bowden

Houston Methodist

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.

Original language	English (US)
Pages (from-to)	2809-2810
Number of pages	2
Journal	Journal of the Electrochemical Society
Volume	132
Issue number	11
DOIs	https://doi.org/10.1149/1.2113673
State	Published - Nov 1985

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

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title = "Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems",

abstract = "The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.",

author = "Gozdz, \{Antoni S.\} and Craighead, \{Harold G.\} and Bowden, \{Murrae J.\}",

year = "1985",

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doi = "10.1149/1.2113673",

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T1 - Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

AU - Gozdz, Antoni S.

AU - Craighead, Harold G.

AU - Bowden, Murrae J.

PY - 1985/11

Y1 - 1985/11

N2 - The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.

AB - The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.

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U2 - 10.1149/1.2113673

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M3 - Article

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JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 11

ER -

Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Abstract

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