Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Antoni S. Gozdz, Harold G. Craighead, Murrae J. Bowden

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.

Original languageEnglish (US)
Pages (from-to)2809-2810
Number of pages2
JournalJournal of the Electrochemical Society
Volume132
Issue number11
DOIs
StatePublished - Nov 1985

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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