Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Antoni S. Gozdz; Harold G. Craighead; Murrae J. Bowden

doi:10.1149/1.2113673

Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Antoni S. Gozdz, Harold G. Craighead, Murrae J. Bowden

Houston Methodist

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.

Original language	English (US)
Pages (from-to)	2809-2810
Number of pages	2
Journal	Journal of the Electrochemical Society
Volume	132
Issue number	11
DOIs	https://doi.org/10.1149/1.2113673
State	Published - Nov 1985

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

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title = "Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems",

abstract = "The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.",

author = "Gozdz, {Antoni S.} and Craighead, {Harold G.} and Bowden, {Murrae J.}",

year = "1985",

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AU - Gozdz, Antoni S.

AU - Craighead, Harold G.

AU - Bowden, Murrae J.

PY - 1985/11

Y1 - 1985/11

N2 - The authors report an efficient synthesis, properties and lithographic performance of soluble poly(silane sulfone)s in which the silicon-bearing group is separated from the main chain by one or more methylene groups.

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JF - Journal of the Electrochemical Society

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Alkenylsilane Sulfone Copolymers and Terpolymers as Electron-Beam-Sensitive Positive Resists for Two-Layer Systems

Abstract

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