Abstract
The actuation and internal friction of torsional resonators were theoretically and experimentally analyzed. It was shown that torsional excitation could be provided from the asymmetry resulting from fabrication imperfections as small as 10-20 nm. A thin Al film was found to have a great degrading effect on Q. A broad peak of temperature dependent internal friction observed in the 160-190 K range was attributed to Debye relaxation.
Original language | English (US) |
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Pages (from-to) | 3549-3551 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 18 |
Issue number | 6 |
DOIs | |
State | Published - Nov 2000 |
Event | 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA Duration: May 30 2000 → Jun 2 2000 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering