A MEMS RF phase and frequency modulator

R. B. Reichenbach; K. L. Aubin; M. Zalalutdinov; J. M. Parpia; Harold G. Craighead

doi:10.1109/SENSOR.2005.1496638

A MEMS RF phase and frequency modulator

R. B. Reichenbach, K. L. Aubin, M. Zalalutdinov, J. M. Parpia, Harold G. Craighead

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We present a method to create a RF MEMS oscillator with continuous control of the output phase and frequency. When the weakly nonlinear oscillating system becomes synchronized with an imposed sinusoidal force of close frequency, the resonator frequency can be detuned with a DC bias on a resistive actuator to produce an easily controlled phase differential between the injected signal and the resonator feedback. We demonstrate a 26 MHz MEMS oscillator with frequency tunability of 0.3% and phase tunability of 200°. By modulating the Joule heat dissipated in the structure, a 26 MHz carrier frequency was either frequency modulated by a 30 kHz baseband signal with a modulation depth of 15 kHz, or phase modulated by a 20 kHz baseband signal with a modulation depth of 160°.

Original language	English (US)
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1059-1062
Number of pages	4
Volume	1
DOIs	https://doi.org/10.1109/SENSOR.2005.1496638
State	Published - Nov 9 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: Jun 5 2005 → Jun 9 2005

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	6/5/05 → 6/9/05

Keywords

Entrainment
Phase Modulation
RF MEMS
Voltage Controlled Oscillator

ASJC Scopus subject areas

Engineering(all)

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10.1109/SENSOR.2005.1496638

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Reichenbach, RB, Aubin, KL, Zalalutdinov, M, Parpia, JM & Craighead, HG 2005, A MEMS RF phase and frequency modulator. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. vol. 1, 2E4.151, pp. 1059-1062, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 6/5/05. https://doi.org/10.1109/SENSOR.2005.1496638

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title = "A MEMS RF phase and frequency modulator",

abstract = "We present a method to create a RF MEMS oscillator with continuous control of the output phase and frequency. When the weakly nonlinear oscillating system becomes synchronized with an imposed sinusoidal force of close frequency, the resonator frequency can be detuned with a DC bias on a resistive actuator to produce an easily controlled phase differential between the injected signal and the resonator feedback. We demonstrate a 26 MHz MEMS oscillator with frequency tunability of 0.3% and phase tunability of 200°. By modulating the Joule heat dissipated in the structure, a 26 MHz carrier frequency was either frequency modulated by a 30 kHz baseband signal with a modulation depth of 15 kHz, or phase modulated by a 20 kHz baseband signal with a modulation depth of 160°.",

keywords = "Entrainment, Phase Modulation, RF MEMS, Voltage Controlled Oscillator",

author = "Reichenbach, {R. B.} and Aubin, {K. L.} and M. Zalalutdinov and Parpia, {J. M.} and Craighead, {Harold G.}",

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T1 - A MEMS RF phase and frequency modulator

AU - Reichenbach, R. B.

AU - Aubin, K. L.

AU - Zalalutdinov, M.

AU - Parpia, J. M.

AU - Craighead, Harold G.

PY - 2005/11/9

Y1 - 2005/11/9

N2 - We present a method to create a RF MEMS oscillator with continuous control of the output phase and frequency. When the weakly nonlinear oscillating system becomes synchronized with an imposed sinusoidal force of close frequency, the resonator frequency can be detuned with a DC bias on a resistive actuator to produce an easily controlled phase differential between the injected signal and the resonator feedback. We demonstrate a 26 MHz MEMS oscillator with frequency tunability of 0.3% and phase tunability of 200°. By modulating the Joule heat dissipated in the structure, a 26 MHz carrier frequency was either frequency modulated by a 30 kHz baseband signal with a modulation depth of 15 kHz, or phase modulated by a 20 kHz baseband signal with a modulation depth of 160°.

AB - We present a method to create a RF MEMS oscillator with continuous control of the output phase and frequency. When the weakly nonlinear oscillating system becomes synchronized with an imposed sinusoidal force of close frequency, the resonator frequency can be detuned with a DC bias on a resistive actuator to produce an easily controlled phase differential between the injected signal and the resonator feedback. We demonstrate a 26 MHz MEMS oscillator with frequency tunability of 0.3% and phase tunability of 200°. By modulating the Joule heat dissipated in the structure, a 26 MHz carrier frequency was either frequency modulated by a 30 kHz baseband signal with a modulation depth of 15 kHz, or phase modulated by a 20 kHz baseband signal with a modulation depth of 160°.

KW - Entrainment

KW - Phase Modulation

KW - RF MEMS

KW - Voltage Controlled Oscillator

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VL - 1

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BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

A MEMS RF phase and frequency modulator

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