Abstract
We present a method to create a RF MEMS oscillator with continuous control of the output phase and frequency. When the weakly nonlinear oscillating system becomes synchronized with an imposed sinusoidal force of close frequency, the resonator frequency can be detuned with a DC bias on a resistive actuator to produce an easily controlled phase differential between the injected signal and the resonator feedback. We demonstrate a 26 MHz MEMS oscillator with frequency tunability of 0.3% and phase tunability of 200°. By modulating the Joule heat dissipated in the structure, a 26 MHz carrier frequency was either frequency modulated by a 30 kHz baseband signal with a modulation depth of 15 kHz, or phase modulated by a 20 kHz baseband signal with a modulation depth of 160°.
Original language | English (US) |
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Title of host publication | TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers |
Pages | 1059-1062 |
Number of pages | 4 |
Volume | 1 |
DOIs | |
State | Published - Nov 9 2005 |
Event | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: Jun 5 2005 → Jun 9 2005 |
Other
Other | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
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Country/Territory | Korea, Republic of |
City | Seoul |
Period | 6/5/05 → 6/9/05 |
Keywords
- Entrainment
- Phase Modulation
- RF MEMS
- Voltage Controlled Oscillator
ASJC Scopus subject areas
- Engineering(all)