A MEMS RF phase and frequency modulator

R. B. Reichenbach, K. L. Aubin, M. Zalalutdinov, J. M. Parpia, Harold G. Craighead

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We present a method to create a RF MEMS oscillator with continuous control of the output phase and frequency. When the weakly nonlinear oscillating system becomes synchronized with an imposed sinusoidal force of close frequency, the resonator frequency can be detuned with a DC bias on a resistive actuator to produce an easily controlled phase differential between the injected signal and the resonator feedback. We demonstrate a 26 MHz MEMS oscillator with frequency tunability of 0.3% and phase tunability of 200°. By modulating the Joule heat dissipated in the structure, a 26 MHz carrier frequency was either frequency modulated by a 30 kHz baseband signal with a modulation depth of 15 kHz, or phase modulated by a 20 kHz baseband signal with a modulation depth of 160°.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1059-1062
Number of pages4
Volume1
DOIs
StatePublished - Nov 9 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

Keywords

  • Entrainment
  • Phase Modulation
  • RF MEMS
  • Voltage Controlled Oscillator

ASJC Scopus subject areas

  • Engineering(all)

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