A megahertz nanomechanical resonator with room temperature quality factor over a million

Scott S. Verbridge, Harold G. Craighead, Jeevak M. Parpia

Research output: Contribution to journalArticlepeer-review

164 Scopus citations

Abstract

We demonstrate the fabrication and operation of high aspect ratio tensile stressed silicon nitride string resonators. We explore the parameter space of small cross sections, on the order of 100 nm, and long lengths up to 325 μm, demonstrating that such high aspect ratio resonators can be made with standard wet release processing using a material with internal tensile stress. Room temperature quality factors exceed one million at frequencies above 1 MHz. The utility of such high quality factor flexural resonators to probe the interaction of high frequency nanoscale devices with rarefied gases is demonstrated.

Original languageEnglish (US)
Article number013112
JournalApplied Physics Letters
Volume92
Issue number1
DOIs
StatePublished - 2008

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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